Keithley Instruments 6517B High Resistance/Low Current Electrometers


Key Features
• Measures resistances up to 1018 Ω
• 10 aA (10×10–18 A) current measurement resolution
• Complete hardware-software solution for ASTM
D257 high resistivity measurements with the 6517B,
8009 Resistivity Test Fixture, and the KickStart High
Resistivity Measurement Application
• <3 fA input bias current
• 6½-digit high accuracy measurement mode
• <20 μV burden voltage on the lowest current ranges
• Voltage measurements up to 200 V with >200 Ω input
• Built-in ±1000 V voltage source
• Unique alternating polarity voltage sourcing
and measurement method for high resistance
• Built-in test sequences for four different device
characterization tests, surface and volume resistivity,
surface insulation resistance, and voltage sweeping
• Optional plug-in scanner cards for testing up to ten
devices or material samples with one test setup
• GPIB and RS-232 interfaces

Wide Measurement Ranges

The 6517B offers autoranging over the full span of
ranges on current, resistance, voltage, and charge
measurements. The 6517B combines the following
measurement capabilities:
• Ultra-sensitive ammeter with current measurement
from 10 aA to 20 mA
• Highest impedance voltmeter with voltage
measurement from 1 μV to 200 V
• Ultra-high range ohmmeter with resistance
measurement from 1 Ω to 1018 Ω
• Sensitive coulombmeter with charge measurement
from 1 fC to 2 μC


The Keithley 6517B Electrometer/High Resistance Meter is the worldwide research laboratory standard for sensitive measurements. With over 60 years of low level measurement expertise, Keithley electrometers provide reliable measurements of current levels down to 10 aA (10×10–18 A), charge levels down to 1 fC, and the highest resistance measurements available up to 1018 Ω. The 6517B is also capable of measuring the largest voltage range—up to 200 V—with an input impedance exceeding 200 TΩ. All this performance is built into an instrument that operates as simply as a digital multimeter.

Exceptional Performance Specifications

The 6517B has incorporated Keithley’s decades of expertise in low level measurement technology into an innovative, low current input amplifier with an input bias current of <3 fA, just 0.75 fA p-p noise, and <20 μV burden voltage on the lowest current ranges. The voltage circuit input impedance is greater than 200 TΩ for nearideal circuit loading. These specifications ensure the accuracy and sensitivity needed for accurate low current and high impedance voltage, resistance, and charge measurements in areas of research such as physics, optics, nanotechnology, and materials science. A built in ±1 kV voltage source with sweep capability simplifies performing leakage, breakdown, and resistance testing, as well as volume (Ω-cm) and surface resistivity (Ω/square) measurements on insulating materials.

Keithley Instruments   6517B   Used   54552  

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Used Keithley Instruments 6517B High Resistance/Low Current Electrometers

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